Sputtering Rate Calculator
.sputter-calc-wrapper {
max-width: 800px;
margin: 0 auto;
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color: #333;
line-height: 1.6;
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background: #f8f9fa;
border: 1px solid #e9ecef;
border-radius: 8px;
padding: 30px;
margin-bottom: 40px;
box-shadow: 0 4px 6px rgba(0,0,0,0.05);
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color: #2c3e50;
margin-bottom: 25px;
font-size: 24px;
font-weight: 700;
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display: grid;
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@media (max-width: 600px) {
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margin-bottom: 15px;
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.sputter-input-group select {
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Sputtering Rate Calculator
Calculated Deposition Rate
Angstroms per Second:
0 Å/s
Nanometers per Minute:
0 nm/min
Microns per Hour:
0 μm/hr
Mass Erosion Rate:
0 g/cm²/s
Understanding Sputtering Deposition Rates
Sputtering is a physical vapor deposition (PVD) method used to deposit thin films by ejecting material from a "target" source onto a "substrate" (such as a silicon wafer). This calculator helps engineers and researchers estimate the theoretical rate at which material is removed from the target or deposited onto a surface, based on key physical parameters.
The Physics Formula
The theoretical sputtering rate (R) is fundamentally derived from the mass of the atoms, the ion flux, and the efficiency of the sputtering process. The governing equation used in this calculator is:
R (Å/s) = (1.036 × M × Y × J) / ρ
Where:
- M is the Atomic Weight of the target material (g/mol).
- Y is the Sputtering Yield (number of atoms ejected per incident ion).
- J is the Ion Current Density at the target (mA/cm²).
- ρ is the Material Density (g/cm³).
Key Variables Explained
Sputtering Yield (Y): This is the most complex variable. It depends on the energy of the incident ions (usually Argon), the angle of incidence, and the binding energy of the target atoms. For typical DC magnetron sputtering at 300-500V, yields typically range between 0.5 and 3.0 atoms/ion.
Ion Current Density (J): This represents the "intensity" of the bombardment. In magnetron sputtering, the plasma is confined near the target, allowing for high current densities. This is directly proportional to the power density applied to the cathode.
Reference Properties for Common Materials
If you are unsure of the physical constants for your target, consult the table below for standard values:
| Material |
Symbol |
Atomic Weight (g/mol) |
Density (g/cm³) |
Approx. Yield (Ar+ @ 500eV) |
| Aluminum |
Al |
26.98 |
2.70 |
1.05 |
| Titanium |
Ti |
47.87 |
4.50 |
0.51 |
| Chromium |
Cr |
52.00 |
7.19 |
1.18 |
| Copper |
Cu |
63.55 |
8.96 |
2.35 |
| Silver |
Ag |
107.87 |
10.50 |
3.12 |
| Gold |
Au |
196.97 |
19.32 |
2.43 |
Using the Calculator
To use this tool effectively:
- Select a material from the preset dropdown to auto-fill the atomic weight and density.
- Input the expected Sputtering Yield. You can find this in literature (e.g., Matsunami data) based on your ion energy.
- Input your process Current Density. If you know your total Current (mA) and Target Area (cm²), divide Current by Area to get this value.
- Click "Calculate Rate" to see the deposition speed in Angstroms per second, Nanometers per minute, and Microns per hour.
Note: This calculator assumes a sticking coefficient of 1 and does not account for geometric factors (throw distance) or gas scattering, which typically reduce the actual deposition rate at the substrate compared to the target erosion rate calculated here.
// Database of material properties
var materials = {
"Al": { w: 26.98, d: 2.70, y: 1.05 },
"Cu": { w: 63.55, d: 8.96, y: 2.35 },
"Au": { w: 196.97, d: 19.32, y: 2.43 },
"Cr": { w: 52.00, d: 7.19, y: 1.18 },
"Ti": { w: 47.87, d: 4.50, y: 0.51 },
"Ag": { w: 107.87, d: 10.50, y: 3.12 },
"Pt": { w: 195.08, d: 21.45, y: 1.40 },
"Ni": { w: 58.69, d: 8.90, y: 1.33 }
};
function updateMaterial() {
var select = document.getElementById("materialSelect");
var val = select.value;
if (materials[val]) {
document.getElementById("atomicWeight").value = materials[val].w;
document.getElementById("materialDensity").value = materials[val].d;
document.getElementById("sputterYield").value = materials[val].y;
} else {
// Clear if reset
document.getElementById("atomicWeight").value = "";
document.getElementById("materialDensity").value = "";
document.getElementById("sputterYield").value = "";
}
}
function calculateRate() {
// Get Input Values
var M = parseFloat(document.getElementById("atomicWeight").value);
var rho = parseFloat(document.getElementById("materialDensity").value);
var Y = parseFloat(document.getElementById("sputterYield").value);
var J = parseFloat(document.getElementById("currentDensity").value);
// Validation
if (isNaN(M) || isNaN(rho) || isNaN(Y) || isNaN(J)) {
alert("Please enter valid numerical values for all fields.");
return;
}
if (rho <= 0) {
alert("Density must be greater than zero.");
return;
}
/*
FORMULA DERIVATION:
1. Mass rate (g/cm^2/s) = (J * M * Y) / (z * F)
Where J is A/cm^2. Our input is mA/cm^2, so divide by 1000.
F (Faraday constant) approx 96485 C/mol.
z (Charge) assumed 1 for standard simplified calc.
2. Volume rate (cm/s) = Mass Rate / rho
R_cm_s = ( (J_mA * 10^-3) * M * Y ) / ( 96485 * rho )
3. Convert cm/s to Angstroms/s (1 cm = 10^8 A)
R_A_s = R_cm_s * 10^8
Constant Factor K = (10^5) / 96485 ~= 1.0364
R (A/s) = 1.0364 * M * Y * J_mA / rho
*/
var constant = 1.0364; // Derived from physical constants
// 1. Calculate Rate in Angstroms per second
var rateAngstromsSec = (constant * M * Y * J) / rho;
// 2. Convert to nm/min
// 1 nm = 10 A, 1 min = 60 sec
// Rate (nm/s) = Rate (A/s) / 10
// Rate (nm/min) = (Rate (A/s) / 10) * 60 = Rate (A/s) * 6
var rateNanoMin = rateAngstromsSec * 6;
// 3. Convert to Microns per hour
// 1 micron = 10000 A, 1 hour = 3600 sec
// Rate (um/s) = Rate (A/s) / 10000
// Rate (um/hr) = (Rate (A/s) / 10000) * 3600 = Rate (A/s) * 0.36
var rateMicronHour = rateAngstromsSec * 0.36;
// 4. Calculate Mass Erosion Rate (g/cm^2/s)
// From volume rate (cm/s) * density (g/cm^3)
// Vol rate (cm/s) = rateAngstromsSec * 10^-8
var massRate = (rateAngstromsSec * Math.pow(10, -8)) * rho;
// Display Results
var resultDiv = document.getElementById("result");
resultDiv.style.display = "block";
document.getElementById("resAngstroms").innerHTML = rateAngstromsSec.toFixed(2) + " Å/s";
document.getElementById("resNanoMin").innerHTML = rateNanoMin.toFixed(2) + " nm/min";
document.getElementById("resMicronHour").innerHTML = rateMicronHour.toFixed(3) + " μm/hr";
document.getElementById("resMass").innerHTML = massRate.toExponential(3) + " g/cm²/s";
}